Tokyo Electron is scheduled to start mass producing equipment for manufacturing organic EL panels in 2015. The company will establish the technology to prevent defectives in the panel production process and start the mass production of equipment for manufacturing large-scale panels for organic EL TVs. The company will invest 2,500 million yen in 2013 to hasten the development of a mass production technology and catch up with Ulvac.
The company is developing the evaporation method that sticks organic EL materials evaporated in vacuo on the substrate, and it is simultaneously developing the printing method that applies EL materials to the substrate like ink-jet printer with Seiko Epson. The evaporation method is one step ahead of the printing method, but the former produces more defectives than the latter. The latter requires less production cost than the former, but it has the problem with lengthening the life of materials.
Introduction of Tokyo Electron