Technology:
Tokyo Electron is
scheduled to start mass producing equipment for manufacturing organic EL panels
in 2015. The company will establish the technology to prevent defectives in the
panel production process and start the mass production of equipment for
manufacturing large-scale panels for organic EL TVs. The company will invest 2,500
million yen in 2013 to hasten the development of a mass production technology
and catch up with Ulvac.
The company is
developing the evaporation method that sticks organic EL materials evaporated
in vacuo on the substrate, and it is simultaneously developing the printing
method that applies EL materials to the substrate like ink-jet printer with
Seiko Epson. The evaporation method is one step ahead of the printing method,
but the former produces more defectives than the latter. The latter requires
less production cost than the former, but it has the problem with lengthening
the life of materials.
Introduction of Tokyo Electron
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